This thesis proposes a setup for calibration of piezo actuator by using laser interferometer measuring system named Renishaw ML10. By using calibrated piezo actuator, it is possible to calibrate almost every version of electromagnetic tactil measuring probe, but in this thesis, the application of using calibrated tactil measuring probes of the device as a means for measuring circularity was elaborated. If the tactil measuring probe of the measuring circularity device was placed on the retroreflector of the interferometer system, it would enable direct calibration of the tactil measuring probe for measuring circularity with laser interferometer measuring system. Likewise, it is possible to use a pre-calibrated piezo actuator with suggested set up measuring system, to calibrate tactil measuring probes, in order to measure circularity. In the first part of the thesis, the theoretical explanation of measuring circularity is given, as well as the description of the calibration methods, with an emphasis on tactil measuring probe calibration. Then, the mode of work of the piezo actuator is explained and detailed characteristics and description are given about piezo actuator PI P-621.ZCD and laser interferometer system ML10, which were both used in this theses. After that, a setup for piezo actuator calibration was designed with use of laser interferometer system, and preliminary measurements were performed. Finally, based on the analysis of the obtained results, the applicability of developed method for calibration of piezo actuator displacements is shown.